Used KLA / TENCOR Puma 9100 #9023788 for sale

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ID: 9023788
Vintage: 2006
Pattern defect inspection system, 2006 vintage.
KLA / TENCOR Puma 9100 wafer testing and metrology equipment is the latest offering from KLA Corporation, the world leader in semiconductor metrology and inspection. This versatile system has been engineered to support a wide range of advanced patterning applications. The advanced patterning capabilities of KLA Puma 9100 include: full-chip automated optical inspection (AOI), automated process control (APC), resist detection, defect detection, and quantified defect analysis. It also offers powerful process optimization capabilities, allowing users to adjust their process parameters according to their specific requirements. TENCOR Puma 9100 features advanced optics and imaging technologies to capture the most detailed images possible. Its fast and precise optics allow for the rapid sensing of both surface and sub-surface features. TENCOR proprietary Orthogonal Transfer Unit (OTS) provides users with the ability to rapidly inspect and measure patterned wafers from one side without rotating the sample. Puma 9100 is outfitted with four separate camera modules for varying resolutions, enabling users to inspect various areas of the wafer with ease. The ResolveMax™ imaging software provides users with a comprehensive view of the wafer's structure, allowing them to measure, detect, and quantify defects. KLA / TENCOR Puma 9100 also offers advanced metrology capabilities with its KLA / TENCOR metrology tools. Users can remotely access the machine's graphical user interface (GUI) to measure line widths, review layouts, and set tolerances. These tools allow users to quickly spot defects and take necessary corrective action. KLA has created KLA Puma 9100 to be a reliable and reliable wafer testing and metrology solution. The tool has been designed to be robust and durable while providing the highest levels of accuracy and repeatability. The asset's advanced features and tools make it an ideal choice for process engineers who need to optimize their process.
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