Used KLA / TENCOR Puma 9120-IS #9016502 for sale

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ID: 9016502
Patterned wafer inspection system, 2007 vintage.
KLA / TENCOR Puma 9120-IS is a fully-automated wafer metrology and testing equipment used in the semiconductor industry. It is capable of measuring and analyzing electrical and physical characteristics of integrated circuits (ICs) including tiny features as small as 0.1 micron in size. KLA Puma 9120-IS is equipped with a powerful optical microscopy system which uses a CCD camera and magnifying lenses to measure detailed characteristics of device structures and other features on wafers. It is able to capture images with a resolution of 5x5 microns and capture features smaller than the 3D depth of 30 nanometers. The unit also has the ability to measure linear and angular patterns of devices up to at least 30 microns, enabling precision on a microscopic level. To characterize, analyze and troubleshoot a device's performance, the machine utilizes a range of different technologies including wafer-to-wafer active alignment measurement, coordinate measuring machine (CMM), and variable angle spectroscopic ellipsometry (VASE). By providing users with these three tools for advanced analytical measurements, TENCOR Puma 9120-IS is an exceptional platform for electrical and physical characterization of ICs. In terms of testing functionality, Puma 9120-IS has the capability to perform a variety of tests such as surface measurements, probing, electrical protocol testing, leaky substrates testing, and die pull testing. It is also capable of wafer-level enhancement testing for a wide range of devices like DRAMs, Flash devices, EPROMs, OTPs, and LCDs. Additionally, the Puma supports automated wafer handling for up to 200 mm diameter wafers. It also offers an integrated defect review tool with both automatic review by algorithms and user-defined criteria, allowing faster problem solving. KLA / TENCOR Puma 9120-IS is a high-performing instrument that offers accuracy and precision of measurements which makes it an ideal choice for the characterization, testing, and troubleshooting of integrated circuits. It is capable of handling a variety of integrated circuits and its support for auto-focus and auto-measure technologies help to ensure correct results and save time.
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