Used KLA / TENCOR Puma 9120 #293659319 for sale
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ID: 293659319
Wafer Size: 12"
Vintage: 2007
Darkfield inspection system, 12"
(2) Cassettes / FOUP Positions
(3) Inspection pixel models: Sizes (sLXX) sL5, sL8, sL20
Does not include:
Hard Disk Drive (HDD)
Dry pumps
Electrical requirements: 208 VAC, 60 Hz, 83 Amps
Operating system: Windows 2000 5.00.2195 Service Pack 4
PC Processor type: x86 Family 15 Model 4 Stepping 10 GenuineIntel ~3391 Mhz
2007 vintage.
KLA / TENCOR Puma 9120 is a state-of-the-art wafer testing and metrology equipment that enables high-precision semiconductor fabrication and inspection. This system is capable of inspecting both advanced semiconductor devices such as microprocessors, memories, and mobile application processors as well as production-level components including resistors, diodes, and transistors. KLA Puma 9120 is equipped with an advanced optics unit and dual scan heads, enabling it to collect high-resolution images of wafer features. It features a four-stage topography reconstruction technique, coupled with automated defect classification software, to provide an automated in-depth review of wafer test data. The machine is capable of detecting and locating defects as small as 10 nanometers, and provides comprehensive statistics regarding each defect. The tool utilizes several proprietary algorithms, including 3D wafer topography processing, multi-wavelength interference imaging (MWIP), and dynamic back-lighting, to ensure the highest level of yield control and inspection accuracy. TENCOR Puma 9120 is designed with an integrated co-axial alignment asset. This provides additional image capturing capabilities during scanning, and allows the model to capture multiple images in a single pass. Additionally, it is designed to support a variety of wafer sizes, including 200 mm and 300 mm wafers, as well as managing wafer thicknesses up to 6mm. Puma 9120 also provides a number of health and safety benefits, such as low vibration levels, wide temperature ranges, and a low-noise, dust-resistant environment. The equipment can also be used for the inspection of liquid and gaseous samples. Overall, KLA / TENCOR Puma 9120 is a state-of-the-art wafer testing and metrology system that is ideal for semiconductor manufacturing and inspection processes. It features advanced optics and dual scan heads, 3D wafer topography processing, multi-wavelength interference imaging, dynamic back-lighting, and a co-axial alignment unit to ensure the highest levels of accuracy and yield control. Additionally, it provides a number of health and safety benefits, demonstrating its suitability for the inspection of liquid and gaseous samples.
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