Used KLA / TENCOR Puma 9150 #293606942 for sale

KLA / TENCOR Puma 9150
ID: 293606942
Inspection system.
KLA / TENCOR Puma 9150 Wafer Testing and Metrology Equipment is a metrology platform that provides comprehensive, accurate and reliable semiconductor process control and defect analysis. Leveraging a range of advanced metrology technology, including scatterometry, AFM and other optical methods, KLA Puma 9150 platform provides powerful, integrated capability for process control and defect analysis. TENCOR Puma 9150 system enables process control by accurately measuring the critical dimensions have a device during fabrication. This is a feature which helps ensure that each of the successive steps in the process are performed correctly. With Puma 9150, engineers and scientists can monitor the complex surface and feature morphology and the local layer thickness of each and every device that they are making in a production process. KLA / TENCOR Puma 9150 unit is specifically designed to meet the rigorous demands of process and defect analysis. The machine features six adjustable axes and two perpendicular motion axes and is loaded with advanced sensors such as a multi-spot scatterometer that can measure several spots on the wafer at once, a scan-by-spot scatterometer with 200nm resolution, a scanning electron microscope with a resolution of 5nm, and an automated focused ion beam (FIB). All of these sensors provide the ability to make high-resolution optical and electrical measurements. KLA Puma 9150 tool is integrated with a powerful suite of process control and defect analysis software designed to meet the highest standards of quality. The software is capable of performing a range of processing tasks, from simple monitoring and data visualization to complex image processing, feature extraction and statistical analysis. TENCOR Puma 9150 asset delivers fast and accurate metrology results that are suitable for trusted statistical process control. The integrated model provides a powerful platform for predicting Wafer Yield and Quality parameters. With its diverse array of sensors, Puma 9150 equipment accurately detects and corrects any defects during the fabrication process, ensuring that the device performance and yield are optimized throughout the production process. Overall, KLA / TENCOR Puma 9150 Wafer Testing and Metrology System is an effective platform that offers comprehensive and accurate process control and defect analysis. Its advanced metrology technology and powerful software suite provide a reliable and trusted solution for monitoring and optimizing wafer fabrication.
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