Used KLA / TENCOR Puma 9150 #9217535 for sale
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ID: 9217535
Wafer Size: 12"
Vintage: 2006
Darkfield inspection system, 12"
YASUKAWA Transfer robot
ASYST Foup
2006 vintage.
KLA / TENCOR Puma 9150 is an advanced wafer testing and metrology equipment used for on-wafer inspection, metrology, and image analysis. It features an automated robotic arm, precise motion control, and powerful imaging and processing capabilities to capture images and analyze data quickly and accurately. The system is composed of two main components: the wafer handling stage and the imaging and processing module. The wafer handling stage is an automated robotic arm that precisely positions a sample wafer for the imaging and analysis process, allowing the unit to be used for samples of various sizes. The stage also adjusts the sample's orientation and height to ensure accuracy in the analysis, as well as the imaging and data capture. The imaging and processing module consists of an imaging machine, control interfaces, and multiple processing modules. The imaging tool consists of two charge-coupled device (CCD) cameras and is capable of capturing images with a resolution of up to 10 micrometers. Furthermore, the asset is equipped with multi-focal optics that enable it to gather useful information on the wafers. Meanwhile, the control interfaces, such as KLA GUIMind software, provide an intuitive and comprehensive user experience and allow for comprehensive control of the model, providing integrated data management and advanced analysis. Finally, the equipment includes several processing modules, such as the defect classification module, for comprehensive inspection and metrology. This ensures that the data gathered by the system is accurate and can be further analyzed and used to determine any potential issues with the wafer before it is integrated into a unit. KLA Puma 9150 machine is an important tool for wafer inspection and metrology, providing precise, accurate, and informative data to allow for comprehensive analysis. Its automated robotic arm and powerful imaging and processing capabilities make it an excellent choice for wafer inspections and metrology applications.
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