Used KLA / TENCOR Puma 9550i #9258170 for sale

KLA / TENCOR Puma 9550i is a wafer testing and metrology equipment designed for high accuracy measurements of device features and critical dimensions. It is the latest generation metrology platform from KLA Puma family of system. The 9550i incorporates state-of-the-art technologies and innovations to ensure unmatched accuracy and productivity. At the heart of the unit lies its highly-integrated optical design: a unique optical head featuring a scanning irradiance diffraction imaging microscope (iSCOPE) and a dual deflector design based on two interferescope objectives, both arranged in a multi-axis flexure stage. The iSCOPE allows for simultaneous imaging of multiple criteria over the entire surface of the device and is able to provide analysis of critical feature sizes, critical height/angle and overlay measurements of both top and bottom side of the device. The dual deflector design allows for both high accuracy measurements of the critical dimension and precise critical height/angle measurements of both surfaces with motions of sub-nanometer precision. In addition to its superior optical design, the 9550i also offers high speed measurements with 30ms single-click measurement time, feature identification in less than 2 seconds, and wafer mapping with full coverage in less than 12 minutes. The machine also boasts superior repeatability with a 5 sigma precision of 0.96nm Critical Dimensions and 0.76nm overlay error. To further facilitate the users in their process, the 9550i also offers a forward-thinking user interface UI with intuitive menu driven interface which reduces user training time and provides "step-by-step" examples for automated measurements and analysis. TENCOR proprietary pattern recognition software, the Automated Feature Recognition (AFR), ensures high throughput and accurate spacing analysis from as little as a few scanned images. KLA Puma 9550i is a groundbreaking wafer testing and metrology tool that is specifically designed for precision measurements and offers features not found in any other competing platforms. Its innovative optical design provides unmatched accuracy, performance, and productivity, while its user interface, software options, and superior feature recognition capabilities help users quickly identify and analyze critical features, enabling them to get their projects done faster and more efficiently. With its superior performance and user friendly features, the 9550i is the ideal choice for advanced precision measurements.