Used KLA / TENCOR Puma 9650 #293814960 for sale

KLA / TENCOR Puma 9650 is an automated wafer testing and metrology equipment designed specifically for the semiconductor industry. It combines technology for quick and accurate testing of patterned wafers with multiple inspection technologies for a complete suite of testing capabilities. KLA Puma 9650 system utilizes optical bright field (OBF) and advanced metrology technologies to quickly perform full wafer inspection and measurements. It features full wafer imaging and pattern recognition capabilities, including an enhanced high-resolution color CCD camera, for quickly capturing wafer images and providing a detailed overview of the wafer's features. Its overlay stepper alignment ensures accuracy in overlay measurements and the repeatability of the testing results. The unit's metrology capabilities include three-dimensional imaging for detailed characterizations of nanometer-scale structures, sidewall thickness, and overlay/registration measurements. It can also be used to measure parameters such as critical dimension (CD) and line width roughness (LWR) on a variety of wafer substrates such as copper, titanium, and gallium arsenide. To ensure accuracy, TENCOR Puma 9650 also features a wafer autofocusing machine and a high-power illumination tool for bright field imaging. This ensures the wafer is in focus at the highest level of detail and improves the accuracy of the measurements. In addition, the asset comes with a patented hybrid-stage model, which offers the flexibility of performing two types of measurements on wafer level and die level. This helps to reduce rework and materials costs as small sample sizes can be tested. The integrated VisionLink software provides a user-friendly graphical interface and enables automated testing and analysis. It provides powerful data analysis capabilities for comprehensive defect and failure analysis and trend analysis. The software also simplifies the setup process for basic and complex measurements, enabling fast and effortless operation. Overall, Puma 9650 is a state-of-the-art wafer testing and metrology equipment designed to provide accurate measurements and quick inspection of patterned wafers. With its advanced metrology systems and hybrid-stage system, the unit is well-suited for applications such as photomask defect inspection, contactless wafer probe testing, and die yield monitoring.