Used KLA / TENCOR Quantox XP #293830783 for sale
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ID: 293830783
Wafer Size: 8"-12"
Vintage: 2004
Measurement system, 8"-12"
2004 vintage.
KLA / TENCOR Quantox XP is an automated wafer testing and metrology equipment that delivers fast, accurate, and traceable measurements on wafers. It is designed for production use in semiconductor fabrication environments and can be used for a variety of semiconductor metrology applications, including the measurement of critical dimension (CD), line edge roughness (LER), isolated line width, contact hole, and device interaction matrix (DIM). The system is comprised of three main modules - a motorized sample "pick and place" module, a scanning electron microscope (SEM) imaging and patterning module, and a microprobe sample analysis module. The pick and place module is responsible for positioning the wafer on the stage, while the SEM imaging module allows for imaging of feature patterns on the wafer. The microprobe sample analysis module is used for in-depth analysis of the wafer's features. At the heart of KLA Quantox XP unit is the GEMStar software platform, which is designed to facilitate the entire metrology process from sample placement to feature measurements. The platform is designed to be user-friendly and provides comprehensive data management across the entire testing process. GEMStar also features an extensive library of algorithms that allow for multiple types of measurements to be performed. TENCOR Quantox XP machine is equipped with a variety of automation features that help to ensure consistent and reliable operation. The tool features an automated calibration process that ensures accuracy and repeatability of measurements for each wafer. This coupled with an automated sample loading and cleaning process allows for uninterrupted and efficient wafer metrology. The asset also boasts several advanced analytics tools including feature recognition, multi-feature contamination detection, automated optimization for data collection, and more. In addition, Quantox XP model is designed for compatibility with other existing KLA systems. It provides a seamless integration with other systems in a customer's equipment of choice, ensuring process consistency and data uniformity. Overall, KLA / TENCOR Quantox XP is a robust wafer testing and metrology system that provides fast, accurate, and traceable measurements on wafers. With its extensive automation features, robust data management platform, and compatibility with other TENCOR systems, KLA Quantox XP unit is the perfect partner for any semiconductor fabrication environment.
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