Used KLA / TENCOR Quantox XP #9296678 for sale
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ID: 9296678
Wafer Size: 12"
Vintage: 2001
Measurement system, 12"
CE Marked
2001 vintage.
KLA / TENCOR Quantox XP is a wafer testing and metrology equipment designed for comprehensive defect analysis and fault diagnostics. It has five key features that enable it to accurately measure and process scanned data from wafers or other substrates. First, a digital imaging system captures images of the wafer surface, enabling accurate inspections and measurements of wafer geometry, both at the macro level, and at the sub-micron level. Second, the detection unit offers optimal signal-to-noise ratio and full-field measurement capabilities at resolutions of up to 5µm. This enables detection of even the smallest defects and contaminants. Third, the machine's advanced luminescence imaging capabilities allow for the assessment of dopant mapping, grain structure, photolithography, and quantum dot applications. Fourth, KLA Quantox XP is uniquely designed for automated wafer mapping and defect inspection in real-time, enabling high process throughput. It uses advanced user-defined recipes for automated operation even in complex environments. Finally, the tool's comprehensive analysis and reporting capabilities provide detailed reconstructions of the wafer defect landscape and comprehensive characterization of defects in production. For wafer manufacturers, this asset offers a significant quality improvement by identifying and qualifying significant defects during production, avoiding costly rework and scrap. It is easy to use, with straightforward GUI-based operation. Additionally, it is designed for scalability, so the user can start with a basic model and add more features as the process requirements become more sophisticate. Lastly, it is built to provide long-term use, with upgradeable components to allow for continuous improvements in equipment performance.
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