Used KLA / TENCOR SFS 6420 #293755921 for sale

KLA / TENCOR SFS 6420 is a wafer testing and metrology equipment designed to facilitate full wafer analysis and enable the development, manufacturing, and high-yields of state-of-the-art semiconductor designs. The system boasts an extensive suite of features for both front-end and back-end process optimization. At the heart of the unit is a patented on-wafer scanning electron microscope (SEM) that delivers high throughput and superior image quality. This is in part due to its advanced alignment capabilities that enable precise acquisition across a large area of the wafer. Additionally, the on-wafer SEM offers high resolution imaging, crystal orientation determination, process control, yield analysis, and topography of all feature types. KLA SFS 6420 includes additional features such as advanced spectroscopic imaging to detect and measure materials such as metals, insulators, nitride, and polysilicon with extreme accuracy. Also included is a Scanning Spreading Resistance Microscope (SSRM) for in-depth measurements of semiconductor devices like transistors, resistors, and transducers. By combining accurate wafer measurements with powerful software-based analysis tools, the SSRM can provide high-resolution profiles of electrical parameters. Moreover, TENCOR SFS 6420 integrates a photo-conductor ebeam sensor that offers quick and reliable measurements of both in-line and critical dimension (CD). This type of measurement can help detect flaws, detect new technology nodes, and optimize processes during yield investigations. Additionally, the machine also offers electron beam induced current (EBIC) technology to non-destructively measure multiple dopant types and concentrations in a single scan. The tool is also user-friendly and user-configurable through its Windows-based user interface. This asset provides a comprehensive set of SPC and Yield analysis tools that can be used to identify process drift, defects, and non-optimal conditions quickly and efficiently. SFS 6420 is an advanced technology that delivers full wafer analysis and enables the development, manufacturing, and high-yields of state-of-the-art semiconductor designs. As a powerful wafer testing and metrology model, it can reduce costs and accelerate process optimization for clients across the semiconductor manufacturing industry.