Used KLA / TENCOR SFS 7600 #293645416 for sale

ID: 293645416
Vintage: 1994
Patterned wafer inspection system 1994 vintage.
KLA / TENCOR SFS 7600 is a next-generation wafer testing and metrology equipment designed for high-performance wafer inspection and analysis. It is a scalable and modular platform that supports a range of substrates, including silicon, compound semiconductors, and organic and with a wide range of test configurations. The system can be configured to measure critical/overall dimensions (CD/OD) or critical dimensions small angle/CDSA , multi-die/CDMD and misalignment/overlay. The unit is equipped with advanced optics, high-resolution image analysis, and automated vision-based testing capabilities to detect and characterise defects with up to 5nm resolution. In addition to imaging and inspection technology, it also integrates a comprehensive range of metrology tools, including four-dimensional laser scanning microscopy, optical and scanning electron microscopy and general optical systems, to enable the measurement of edge resolution and other critical substrates. KLA SFS 7600 also supports extensive wafer-level metrology and testing capabilities, including total wafer stress/strain and electrical measurement, optical critical dimension (OCD) determination, and thermal residual stress measurement. It also provides an advanced portfolio of smart analytical tools such as targeted sampling and automatic pattern recognition, as well as a wide range of automated testing and data reporting processes to ensure efficient and accurate results. The machine is designed for use in a variety of industrial applications, from research and automotive through to aerospace and consumer electronics. It delivers high-quality images, advanced processing and accurate data for the identification and characterization of defects, to help ensure product quality, process uniformity and yield control. As well as being highly configurable and easy to use, TENCOR SFS7600 integrates seamlessly with other wafer testing systems and enterprise solutions to enable comprehensive data management and traceability.
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