Used KLA / TENCOR SFX 100 #293761851 for sale

KLA / TENCOR SFX 100
ID: 293761851
Wafer Size: 12"
Vintage: 2007
Thickness measurement system, 12" 2007 vintage.
KLA / TENCOR SFX 100 is a wafer testing and metrology equipment that provides highly accurate results for the silicon wafer manufacturing process. It is designed to analyze a wide range of silicon wafer parameters quickly and precisely, allowing for fast and efficient quality control management. The main components of KLA SFX 100 are the achromatic auto/manual alignment system, the auto/manual alignment processor, and the auto-aligner microscope. The achromatic unit uses two CCD cameras mounted facing each other to provide precise alignment of the wafer within the instrument's fields of view. The machine is also equipped with an auto-aligner module which uses an algorithm to locate, identify, and trace a wafer's pattern points for precise alignment in less than a second. TENCOR SFX 100 has a powerful optical tool that allows for automatic wafer measurements and offers both manual and automated metrology functions. The asset can measure a wide range of parameters, including dicing/etching, peak surface roughness, and line width, with an accuracy of up to 0.5 nanometers, as well as layers of photoresist/etching material and other features. SFX 100 is also capable of wafer-by-wafer optimization to ensure that batch processing is as efficient as possible. This is accomplished by incorporating a closed-loop feedback model that allows the user to instantly make the necessary adjustments to the wafer parameters once they have been measured. This helps reduce the time spent on traditional overhead operations such as calibrating and optimizing the equipment when running an experiment. In addition, KLA / TENCOR SFX 100 can utilize a high-precision laser interferometer to inspect the wafer geometry. It can accurately measure a wide range of critical geometrical and dimensional parameters including line widths, feature heights, corner radii, and non-linearity distributions. Overall, KLA SFX 100 is an advanced wafer testing and metrology instrument ideal for semiconductor manufacturing. It offers efficient measurement of a wide range of critical parameters with high precision and accuracy. The system's automated and manual alignment solutions guarantee that each wafer is accurately positioned within the instrument's field of view. Additionally, TENCOR SFX 100's high-precision laser interferometer and closed-loop feedback unit allow the user to customize the parameters of the wafer quickly and efficiently.
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