Used KLA / TENCOR SFX 100 #9249578 for sale

KLA / TENCOR SFX 100 is a wafer testing and metrology system that provides automated testing and analysis of substrates and thin films. The system has two main components: an optics module for imaging and film metrology, and an electronics module for high-resolution electrical testing. For optical analysis, KLA SFX 100 has a frequency-tuned, 'wide-field' microscope. This allows for non-contact, non-destructive imaging of large wafer surfaces. It is capable of looking at various parameters such as topography and microstructure. With the addition of certain accessories, it can measure film thickness and particle size. The electronics module is comprised of four separate instruments. This includes a laser interferometer and a voltage probe for measuring high-frequency signals, and a scanner stage and pressure scanner for measuring the lateral electrical properties of the substrate across a given area. This module can be used to measure the resistance of the substrate, as well as the capacitance and current flow of the device. TENCOR SFX 100 offers fast, automated analysis of the device, substrate, and film. It can quickly and accurately measure a wide range of parameters limited only by the selection of probes and accessories. It is well suited for fast testing of thin film devices and provides detailed insights into the electrical, optical, and structural properties of the wafer.