Used KLA / TENCOR SFX 100 #9351463 for sale

KLA / TENCOR SFX 100
ID: 9351463
Vintage: 2004
Thickness measurement systems 2004 vintage.
KLA / TENCOR SFX 100 wafer testing and metrology equipment is a next-generation platform specifically designed to enable testing, inspection, and metrology processes. The system utilizes adaptive optics, 5-axis motion control, automated pattern recognition algorithms, and high-speed sensor elements to enable precision measurement of integrated circuits and opto-electronic components. KLA SFX 100 can measure various types of electrical and optical signals, including Si/SiO2 layers, line/space, isolation shapes, and feature sizes. The unit can detect and correct aberrations and display surface variations with outstanding repeatability and accuracy. TENCOR SFX 100's adaptive optics and motion control dynamically adjust the imaging plane lens, aperture, and motion plane of the imaging arm to optimize signal touches and intensity levels. The 5-axis motion control minimizes vibration during component testing and metrology, and enables scanning of large area components. SFX 100 includes automated pattern recognition algorithms for component identification and automated signal and feature recognition algorithms for signal processing and defect detection. The machine is integrated with built-in signal evaluation technology to output data quickly, accurately, and efficiently. It can also create detailed component and tool models for manufacturing analysis and validation. KLA / TENCOR SFX 100 features an intuitive user interface and a graphical user interface for simple setup, operation, and reporting. It is also integrated with SCI (or Standard Calibration Interface) for efficient data exchange, integration with other systems, and batch processing. In sum, KLA SFX 100 is a highly sophisticated asset specifically designed to enable high-accuracy testing, inspection, and metrology processes. Its combination of adaptive optics, 5-axis motion control, automated pattern recognition algorithms, and high-speed sensor elements enable precision measurement of integrated components and opto-electronic components. Its intuitive user interface, automated signal and feature recognition algorithms, and built-in signal evaluation technology streamline the process of component testing and metrology.
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