Used KLA / TENCOR SFX 200 #293587424 for sale
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KLA / TENCOR SFX 200 is a wafer testing and metrology equipment that provides the precision and control needed for failure analysis and process optimization. Ideal for use in the semiconductor industry, the system offers a variety of advanced features and benefits that make it a top choice for designers and engineers. The core of KLA SFX 200 unit is a multi-zone scanning electron microscope (SEM) with a high-resolution secondary electron detector and a high vacuum electron source. The modular design of the machine allows for the integration of various sample prep modules, such as specimen cleaning and coating, for further investigation of metrology samples. The large working area of the tool (200mm on its nominal field of view) provides room for multiple MEMS or asset-on-chip designs while combining critical features such as sub-micrometer resolution and automation. The wide variety of wafer exam systems available lets users design and customize their systems to fit specific needs. For example, the model uses a non-contact top-down imaging method, which eliminates the need to prepare and repair boresighted test specimens on the working surface, while providing accurate measurements and imaging. The equipment also uses multiple illumination sources to identify, characterize and digitize any defect on the surface of the wafer. All of these features can be configured and programmed to improve the analytical tasks of investigations. TENCOR SFX 200's graphical user interface (GUI) is designed to help track, analyze, report and archive test data with minimal effort. The system offers a powerful combination of signal acquisition, data visualization and automation tools to simplify the workflow. The open-architecture programming ensures that any platform can be easily incorporated into the test setup. For additional value, the unit is fully compatible with optional SPC, FDC and statistical-analysis software. The SPC feature assures that sample profiles comply with protocols, while FDC quantifies the accuracy and repeatability of the test parameters and provides meaningful data for analysis. The integrated statistical-analysis software also helps users create correlations, standardized behavior, and plots that aid in process optimization and defect characterization. Overall, SFX 200 Wafer Testing and Metrology machine is a versatile, user-friendly solution that makes wafer testing and metrology faster, easier, and more accurate. With its high-resolution imaging and large working area, the tool enables users to complete comprehensive diagnosis and characterization of complex devices. The advanced features of this asset make it the perfect choice for failure analysis and process optimization.
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