Used KLA / TENCOR SLF17 #293661244 for sale
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ID: 293661244
Reticle inspection system
Reticle loading:
SEMI Standard reticle: SLF17HR-Ursa handle
SLF17HR-Ursa automatic loading with SAL
Reticle dimensional:
Sizes: 5", 6", 7"
Front pellicle height: 6.3 mm
Back pellicle height: None
Maximum pellicle dimension: 149.3 mm x 122 mm for 6" W-DUV reticle
Reticle pattern: 7 mm
Internal storage: FAL Magazine
Pixel sizes: 150, 186, 250 nm
Image acquisition:
Wavelength laser: 364 nm
UV Sensors for transmitted and reflected light
Through-the-lens automatic focusing system
Air-bearing reticle stage with laser interferometer
Data automation/Connectivity:
100 BaseT Network connection
Interface with 97i platform SL3UV and (KLA98/99).
KLA / TENCOR SLF17 is a wafer testing and metrology equipment designed specifically to meet the needs of semiconductor manufacturers. It offers advanced technology and the ability to efficiently perform all sorts of wafer-level tests and measure various critical parameters for achieving maximum chip yield and quality. KLA SLF17 is an integrated metrology system that provides a comprehensive suite of automated test and measurement solutions. It's built on a modular architecture that allows operators to easily expand the unit with additional components as needed. This enables users to customize the machine to their process requirements and product goals. TENCOR SLF17's flexible architecture ensures that it can be used for exacting wafer-level measurements that are essential for today's most advanced semiconductor processes. SLF17 can be equipped with a wide range of test, imaging, and measurement capabilities. Its main test subsystems include an Electro-Optical Inspection module, Die-to-Die Testing, and an Oscilloscope. The tool also features an automated wafer handling and standard Positioning Control Module along with advanced data acquisition software. This combination of hardware and software makes KLA / TENCOR SLF17 an ideal tool for performing wafer tests with maximum speed and accuracy. In addition, KLA SLF17 offers a variety of optional features that can make the asset even more powerful. Options include high-density wafer mapping, defect capture with electrical probing modules, die-level imaging systems, defect mapping engines, and long-term storage solutions. This wide range of features makes TENCOR SLF17 highly versatile and well-suited for performing a variety of wafer-level tests and measurements. Overall, SLF17 Wafer Testing and Metrology Model is a reliable and advanced metrology equipment that can provide an array of automated test and measurement functions for achieving the highest-quality semiconductor chips. From its advanced hardware to its flexible architecture, KLA / TENCOR SLF17 is an ideal choice for today's most demanding semiconductor manufacturing processes.
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