Used KLA / TENCOR Spectra FX 100 #9257025 for sale
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ID: 9257025
Wafer Size: 12"
Vintage: 2004
Thickness measurement system, 12"
EFEM
UI
(2) SEMES Tool buffers
Operating system: Windows XP
(2) BROOKS ISO Load ports
PRI Transfer robot arm
SMIF / FOUP
Missing parts:
Fine focus board
Tilt board
MCB Board
Stage chuck
Monitor
Focus flipper
UV Filter
PC
CPU Board
Frame board
Hard Disk Drive (HDD)
Power: 208 V, Single phase
2004 vintage.
KLA / TENCOR Spectra FX 100 is a wafer testing and metrology equipment designed for the highest performance and reliability in the semiconductor industry. With its advanced metrology capabilities, it provides the most accurate and precise measurements of a wide range of wafer features. It is used for process optimization and lot acceptance, ensuring that the highest standards of quality and performance are met throughout the manufacturing process. KLA Spectra FX 100 is equipped with a full range of test and measurement capabilities, including process characterization, defect inspection, film thickness measurements, overlay measurements, and defect review. It is capable of testing and measuring features with nanometer resolution, making it the most advanced system in its class. It is also designed to allow the user to create custom measurement operations and solutions, making it adaptable to almost any process. TENCOR SPECTRA FX100 is designed with a number of advanced features that make it the ideal tool for high-performance processes, including a highly calibrated advanced flying detection unit and a high-precision laser vision machine. The advanced flying detection tool is designed to detect and precisely measure even the smallest wafer features accurately and quickly. The laser vision asset is designed to inspect wafers in three or six degrees of freedom and can accurately measure even the most challenging geometries. KLA SPECTRA FX100 is built for reliability and accuracy, with robust hardware and software and a stringent calibration process that ensures all measurements are within specifications. It also includes a powerful onboard computer for data analysis, enabling users to quickly analyze, compare, and fine-tune processes. Additionally, a closed loop metrology model assures repeatable accuracy and quality. The equipment is also extremely user-friendly and is simple to set-up, operate and maintain. In summary KLA / TENCOR SPECTRA FX100 is a wafer testing and metrology system designed for the highest accuracy and precision. It is capable of testing and measuring features with nanometer resolution and is equipped with advanced features such as a highly calibrated advanced flying detection unit and a high-precision laser vision machine. The tool is also built for reliability and accuracy, with robust hardware and software, a stringent calibration process and a powerful onboard computer for data analysis. Additionally, the asset is extremely user-friendly, easy to set-up, operate and maintain, making it the ideal tool for high-performance processes.
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