Used KLA / TENCOR Spectra FX 200 #293712932 for sale
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ID: 293712932
Wafer Size: 8"
Vintage: 2000
Thickness measurement system, 8"
Upgraded from F5X
Single open handler
BROOKS / PRI AUTOMATION ESC-212B-S293 Controller
Signal tower
XENON Arch Lamp source
Options:
SE
DBS
GEM / SECS and HSMS
Operating system: Windows XP
Power supply: 220 V, Single phase, 3 Wire, 15 A, 50/60 Hz
2000 vintage.
KLA / TENCOR Spectra FX 200 is a wafer testing and metrology equipment designed to improve the yield and reliability of leading edge semiconductor devices. It combines several advanced technologies to provide a comprehensive solution for semiconductor manufacturing, including optical metrology, defect imaging and inline electrical testing. KLA Spectra FX 200 is a flexible and scalable platform, allowing for efficient and accurate testing for a wide range of devices. The system uses a unique combination of beam interception and advanced algorithms to precisely map cross-sectional area, as well as interface defects at production speeds. It also incorporates integrated inline electrical test capability, capable of testing wafers up to 4 inches in diameter. This makes the unit ideal for wafer testing and metrology tasks, while providing high speed and accuracy. In addition to its optical metrology capabilities, TENCOR Spectra FX 200 also offers a powerful defect inspection machine. The built-in smart defect imaging module uses several precision cameras and a light engine to inspect and analyze defects to a depth of up to 8 microns with a high degree of accuracy. This allows for quick detection of potential yield-limiting defects. Spectra FX 200 also features advanced defect recognition capabilities. The tool's algorithms are designed to identify and categorize defects in a manner that minimizes false positives and ensures optimal yield. This ensures that only the defects that matter are identified, allowing users to take the appropriate measures to address them. The performance of KLA / TENCOR Spectra FX 200 is backed by an integrated user interface. This graphical user interface (GUI) allows users to quickly retrieve, view and analyze test results from any point in the testing process. This makes the information easily accessible, allowing for greater accuracy and efficiency. KLA Spectra FX 200 is a powerful and versatile wafer testing and metrology asset. It offers a unique combination of advanced technologies and a comprehensive feature set, providing users with an efficient, reliable and accurate solution for high-yield semiconductor device production.
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