Used KLA / TENCOR Spectra FX 200 #9375219 for sale
URL successfully copied!
Tap to zoom
ID: 9375219
Vintage: 2010
Film thickness measurement system
Process: Metrology
2010 vintage.
KLA / TENCOR Spectra FX 200 is an automated wafer testing and metrology equipment used in semiconductor manufacturing. It is designed to measure and collect information on a variety of physical and optical properties of semiconductor wafers, as well as other existing device structures. This system uses KLA proprietary 3D scanning technology to precisely scan wafers up to 200mm in diameter. The two integrated sensors - a linear array detector and dual reflection detector - allow for full and enhanced metrology of surfaces and features on the wafer. KLA Spectra FX 200 offers a wide range of capabilities and features. It has excellent repeatability and accuracy (up to 0.5 microns), is able to capture data from wafers at both high and low levels of illumination, and provides multiple scan modes, which enable testing of a wide variety of wafer sizes. The unit is designed to be cost and time efficient, utilizing a precision stage designed to increase throughput speed and minimize vibration. TENCOR user-friendly software offers a range of features and benefits, such as automatic alignment and tracking, automated scan/measure/report execution, and hardware/software integration. For enhanced image quality, TENCOR Spectra FX 200 features an innovative focusing machine called Auto-Focus Tool (AFS), which utilizes a feedback loop to automatically adjust the focus of the instrument, ensuring high precision and accuracy of the results. Spectra FX 200 also provides useful tools for data collection and analysis. Data is collected in real-time and automatically saved for future reference or processing. Import/export functionality is also available. The asset can be integrated with a host of peripheral devices, such as cameras, lasers, and microscopes. Overall, KLA / TENCOR Spectra FX 200 is an advanced wafer testing and metrology model designed for use in semiconductor manufacturing. Its proprietary scanning equipment and features such as AFS and data analysis tools make it a powerful tool that can assist in the development and refinement of advanced semiconductor devices.
There are no reviews yet