Used KLA / TENCOR SpectraShape 8660 #293587780 for sale

ID: 293587780
Wafer Size: 12"
Vintage: 2013
Optical review system, 12" (3) Load stations Process: OCD Measurement Operating system: Windows XP Does not include Hard Disk Drive (HDD) 2013 vintage.
KLA / TENCOR SpectraShape 8660 is an advanced wafer testing and metrology equipment suitable for a wide range of wafer metrology requirements. It provides excellent accuracy, repeatability and throughput, making it an ideal solution for precise wafer measurement and inspection. KLA SpectraShape 8660 is designed to be an automated, high-resolution system designed for precise surface measurements of up to 125μm. It uses a surface metrology interferometry technology called AutoScan to ensure the accuracy of its measurements and inspections. This technology works by scanning the wafer at very closely-spaced points and using multiple wavelengths to generate measuring data. The unit can measure various crucial parameters such as patterned trench depth, gate gap, via diameter and contact hole size. TENCOR SpectraShape 8660 comes equipped with a large, high-resolution VGA display for viewing results. It has powerful internal data processing capabilities, allowing it to quickly analyze and present data. The machine also supports a variety of probe options and an advanced CCD camera which can aid with operator access and accuracy. KLA also provides a number of value-added features for SpectraShape 8660. One of these is its proprietary 'Spectronet' software, allowing users to easily create, monitor and review data across multiple sites. This software is capable of sharing data with remote workstations, facilitating remote review of reports. KLA / TENCOR SpectraShape 8660 is designed to be easy to use and maintain. Its software interface is intuitive and its maintenance routines are straightforward. Overall, the tool can provide a cost-effective, reliable and precise solution to a range of wafer metrology requirements.
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