Used KLA / TENCOR SpectraShape 8660 #293630250 for sale

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KLA / TENCOR SpectraShape 8660
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ID: 293630250
Optical review system.
KLA / TENCOR SpectraShape 8660 is a wafer testing and metrology equipment used to inspect wafers for defects. The system is equipped with an interferometer that provides both high resolution non-contact 2D and 3D measurements. The wafer is mounted on an adjustable 4-axis stage for quick navigation and precise positioning, allowing it to measure defect sizes, contour profiles, flatness, and other parameters. The unit is capable of up to 0.1nm repeatability (as low as 0.02nm) with a variety of different components, including 6-inch (standard) and 8-inch (options) wafers. KLA SpectraShape 8660 has a variety of advantage features that helps to improve results and workflow. These include an automatic non-contact 2D (height) measurement machine with a non-contact metrology (NCM) tool for defect review and correction. The asset also offers an auto-focus function for faster, more efficient operation. Additionally, the platform also comes equipped with an advanced one-button defect review model to quickly identify and address various defects. The comprehensive data management equipment helps facilitate the storage, analysis, and archiving of all results. Moreover, the system is equipped with a flexible test protocol development option wherein users can create custom algorithms to guide tests. Operators also have the ability to view the data in various interactive 3D visualizations, and customize the data presentation to assist with quality control. TENCOR SpectraShape 8660 is a versatile tool that can save both time and labor in the area of wafer testing and metrology. Its features and options provide highly accurate measurements with repeatable results. Furthermore, the built-in data management and test protocol development can help simplify operations, increase efficiency and accuracy, and help reduce costs.
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