Used KLA / TENCOR SpectraShape 8660 #9223300 for sale

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ID: 9223300
Wafer Size: 12"
Vintage: 2017
Optical review system, 12" (3) Loaders (Auto) Operating system: Microsoft Windows XP Handler unit Metrology unit Power: 208 AC, 2 Phase 2017 vintage.
KLA / TENCOR SpectraShape 8660 is a state-of-the-art wafer testing and metrology equipment designed to measure the electrical, optical, and mechanical properties of semiconductor wafers. It is capable of accurately measuring semiconductor wafers up to 8 inches in diameter, and provides a reliable, repeatable, and cost-effective means of determining the quality of a wafer. The 8660 utilizes a unique multi-sensor technology to collect data from semiconductor wafers. The system consists of a probe, an optics head, and an integrated electrical test electronics. The probe consists of a pyramidal probe array which is capable of contacting up to 8 locations on the wafer simultaneously and can be used in a manual or automated process. The probe can detect changes in electrical resistance and capacitance as well as provide two-dimensional imaging of the wafer surface. The optics head provides optical microscopy which can provide high resolution images to detect surface defects, contaminants, or physical characteristic changes. The integrated test electronics handles the measurement of semiconductor electrical parameters such as carrier mobility, electrical properties, and defectivity. KLA SpectraShape 8660 also provides extensive data analysis capabilities which enable wafer-to-wafer comparison, pattern recognition, and failure analysis. The 8660's extendable integration layer allows customers to integrate additional testing processes into the unit, such as Visual Defect Inspection, Photomask Inspection and automated ITO/ICP testing. With its unique multi-sensor technology and advanced data analysis capabilities, TENCOR SpectraShape 8660 is the ideal wafer testing and metrology machine for semiconductor wafer production facilities. It provides comprehensive wafer testing and metrology to ensure product quality and reduce risk in a cost effective manner.
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