Used KLA / TENCOR Surfscan AIT #9204828 for sale
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ID: 9204828
Patterned wafer inspection system, 8"
Model no: 8010
(2) Blowers
(2) Blower fans
Foot plate
Monitor
Keyboard
Joystick
Jogdial
Floppy Disk Drive (FDD)
(6) Pad
Hard Disk Drive (HDD)
FDD
CDROM
Jaz drive
Stage assembly (8" chuck)
Optic unit
(2) Analog boards PMT 10C
CCD Camera
Microscope DR assembly board
PSF Assembly board
PSF S8000 Assembly board
Robot assembly
Turret assembly:
Objective lens:
10x / 0.30BD
100x / 0.80BD
250x / 0.90BD
System controller card cadge:
Hard disk
Motor driver board
Slot 1: VGA Card
Slot 3: CPU Board
Slot 5: Data processing board 1
Slot 6: Data processing board 2
Slot 8: GPIO Board
Slot 9: TIM Board
Slot 11: ADS Board
Slot 12: Motor control 1
Slot 13: Motor control 2
Slot 15: 4-Port SER board
Slot 17: Network card
Slot 18: DIO 500
Power: 208 V, 60 Hz, Single phase, 30 A
1997 vintage.
KLA / TENCOR Surfscan AIT is a wafer testing and metrology equipment, designed for the inspection and metrology of semiconductor wafers. The system utilizes a combination of optical and x-ray techniques to provide comprehensive and powerful characterization of wafer surfaces. The core component of KLA Surfscan AIT is an inspection chamber, which houses the optics, transmissive sample stages, and collision shield. This chamber is a vacuum environment, and the optics are arranged in an encoded scan pattern that covers the entire wafer. The unit is able to convey a variety of samples into position, rotate them to the required orientation, and measure the surface reflectivity and topography. TENCOR Surfscan AIT has the ability to detect various types of wafer defects, such as particle contamination, scratches, and crystal pattern defects. The machine can provide both spatial and shape information about the defects, in order to precisely pinpoint their location. Additionally, the tool can be used for surface measurement, where surface characteristics such as roughness, scratch depth, and height are measured. In order to provide more detailed analysis, Surfscan AIT offers wafer metrology. This is achieved through combining the asset's optical and x-ray components in order to accurately measure features such as feature size and placement. This is done using the model's advanced imaging algorithms and computational power. KLA / TENCOR Surfscan AIT equipment is robust and reliable, and can be used for a variety of wafer testing and metrology applications. For instance, the system can be used in the qualification of new materials, in the assessment of process performance, or in failure analysis. The unit is also capable of collecting data at higher speeds, allowing a wide range of wafers to be inspected in a short period of time. Overall, KLA Surfscan AIT is an invaluable tool for wafer testing and metrology, making it easier and more efficient than ever to characterize the surfaces of semiconductor wafers.
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