Used KLA / TENCOR TF-2 #136452 for sale
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Wafer Size: 8"
Wafer defect inspection systems, 8", 1994 vintage.
KLA / TENCOR TF-2 is an advanced wafer testing and metrology system for the semiconductor industry. It is a fully automated solution for inspecting, measuring, and analyzing wafers with high potential to yield high-quality chips in an efficient manner. KLA TF-2 uses advanced detection and imaging systems to deliver a comprehensive suite of inspection, analysis, and metrology tools. The system utilizes high-resolution optical scanning and imaging to detect abnormal patterns and defects at the nanometer level. It also has a time-of-flight profilometer and interferometer to deliver high-fidelity height profiles, allowing it to detect regular and irregular topography as small as 0.5 nanometer. Inspection data is gathered, analyzed, and evaluated in real-time, providing rapid and accurate process control. TENCOR TF-2 enables automated acquisition and analysis of critical contamination, quality and yield data, nearly eliminating handling and data entry errors. The system includes advanced software for comparing defects of the same type, for comprehensive feature recognition, for edge and profile measurement, for strain map overlay and sink-in measurements, and for stress and defect density estimation. TF-2 also features automated bin QC/QA, batch-control capabilities, and wafer-level final review. KLA / TENCOR TF-2 offers advanced functionality in a single machine, making it a rather complete solution for industrial and material applications. It commands relatively faster inspection times, improved yield and process control, superb accuracy and repeatability, and lower total costs of ownership. Its speed and reliability make it a preferred choice in high-yielding semiconductor production processes.
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