Used KLA / TENCOR UV 1050 #293750635 for sale

ID: 293750635
Wafer Size: 6"-8"
Film thickness measurement system, 6"-8".
KLA / TENCOR UV 1050 is an advanced wafer testing and metrology equipment used for achieving precise measurements and monitoring of critical semiconductor process parameters. This system combines fast-oscillating shutter and laser alignment technology with an automated six-axis stages for precise macro registration, creating an advanced and versatile unit for defect inspection and review of multiple-die strengths. Features such as advanced die-to-die tracking and fast non-contact metrology ensure that the machine is capable of measuring semiconductor process parameters with unmatched accuracy and repeatability. The tool is capable of inspecting three-dimensional structures such as transistors, dielectric structures, copper interconnects, contact pads, and deep trenches under high-power ultraviolet illumination. KLA UV 1050 includes an advanced optical asset, which includes a 10K pixel UV light source, and an advanced alignment model, with both an encoder and stage controller directed by an onboard computer. Data is captured with a CCD camera, with 12-bit capture resolution, image capture rate of under one millisecond, and high-precision focus. The equipment includes a host of features to ensure accuracy, including automatic alignment and tracking, built-in vision sensors, manual and automated threshold settings, image capture preview, and advanced measurement, analysis and reporting capabilities. The system's automated operation can also be programmed to run customized applications, such as process optimization and defect location assessment. TENCOR UV 1050 is designed for easy operation, requiring minimal setup and operator intervention. With its advanced optics, integrated UV illumination source and intuitive user interface, the unit can quickly identify subtle and challenging defects and provide users with accurate, reliable data for process control and improved yields.
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