Used KLA / TENCOR UV 1050 #293759835 for sale

KLA / TENCOR UV 1050 is a state-of-the-art wafer testing and metrology equipment that offers unparalleled accuracy, repeatability and traceability for semiconductor wafer fabrication process control and inline metrology. Equipped with hard x-ray, optical scatterometry, photometry, Raman spectroscopy and other technologies, this wafer testing and metrology system is designed to measure and verify the uniformity of critical process parameters such as wafer surface flatness, etch depth, dopant concentration, and CD uniformity. KLA UV 1050 was designed to provide the highest accuracy in measurements for sub-100nm geometries. The unit has a 10nm resolution as well as a 0.5nm repeatability accuracy. With its patented vertical scanning technology, the machine is designed to provide excellent accuracy and uniformity across the wafer with no material-width or material-type limitations. Furthermore, its high-precision horizontal scanning eliminates the errors associated with linearity or non-uniformity of optical components. TENCOR UV 1050 is a turnkey metrology solution that can be used in both front-end wafer processing lines and backend metrology labs. With its modular design, it can support high throughput applications with up to 2 wafers per measurement and high accuracy applications with up to 8 wafer measurement reproducibility. In addition to its automated measurements of various critical process parameters, the tool includes various smart features such as automated quadrant alignment and automatic in-situ wafer self-calibration. The user interface of UV 1050 is designed for simplicity and ease of use, while its advanced analytics are tailored for both wafer processing and metrology engineers. All data is stored in standard ASCII, CSV, SQL or other database formats, making it easy to integrate with existing systems. To ensure data accuracy, the asset has an in-built traceability program that tracks model verifications for planar measurements, performance, maintenance activities and equipment calibration. The system is compatible with a variety of substrates, such as silicon, glass, polymers and hybrids, and several operating modes. With KLA / TENCOR UV 1050's affordable cost and innovation, it is the perfect metrology unit for those looking to optimize their yield and materials research.