Used KLA / TENCOR Zeta Scan 280 #293597954 for sale
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ID: 293597954
Wafer inspection system
Laser spot: 405 nm
High speed scanning optics
Motorized XY Stage, 8"
LCD Color monitor, 30"
Nominal: 2560 x 1600 pixels
Wafer handler, dual arm
Light tower
(4) Cassette locators for 4/6"
ULPA Filter
OCR For backside wafer ID reader
Exhaust RFE
GEM / SECS
HSMS
PC Controller:
Operating system: Windows 7
Processor: 64-bit Intel Core 2 Duo
RAM: 64 GB
Hard Disk Drive (HDD): 500 GB
Data acquisition cards.
KLA / TENCOR Zeta Scan 280 is a high-performance automated wafer testing and metrology equipment, designed for uniquely versatile applications on semiconductor industry metrology tasks. This system offers a wide range of 4", 6", and 8" wafer testing capabilities, ensuring high levels of accuracy in the process of wafer testing and data analysis. The Scan 280 is equipped with two laser sensors, allowing for simultaneous testing of the backside surface of the wafer and its front side, as well as data analysis. The sensors are activated by a laser trigger and track each other as the wafer is inspected, offering a fast and reliable way to retrieve accurate data from the wafers. The unit's advanced optical imaging technology offers a wide range of resolution options, capable of achieving important details that allow engineers to meaningful analyze the wafer test data. With an advanced image acquisition machine and an exceptionally fast laser scanning tool, this asset can acquire and analyze 2D, 3D and 4D data in an incredibly efficient manner. KLA Zeta Scan 280 uses an intelligent robotic arm to transport the wafer throughout the testing process. This robotic arm is equipped with a set of proprietary safety features and is able to perform intricate movements, which allows it to accurately grasp and assess different sizes of wafers, as well as to avoid contaminants. Additionally, the wafer transport model ensures correct focusing and capture of images, in order to obtain the desired results. In order to provide high levels of accuracy, TENCOR ZETASCAN 280 equipment also comes with a number of extra protective safety mechanisms. It is equipped with a contactless limit switch, which prevents mishandling of the wafer during transport and can ensure that the device stays safe in the event of an unexpected power failure. Furthermore, the system also comes with an internal oxygen protection unit and an integrated laser shield that keeps the laser safe during operation. KLA / TENCOR ZETASCAN 280 is a powerful and advanced wafer testing and metrology machine, designed and built to meet the needs of the semiconductor industry's needs. This tool is capable of accurately testing wafers and retrieving meaningful data analysis, with levels of detail that can make the difference for successful and high-quality semiconductor production.
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