Used KOBELCO LTA 1000 #293591940 for sale

KOBELCO LTA 1000 is a versatile wafer testing and metrology equipment. It enables detailed analyses of chip performance and feature sizes, to a fraction of a millimetre accuracy. The system consists of an integrated analytical software package, an optical metrology vision unit, and an advanced microscope. The software is enabled with a user-friendly interface, making it suitable for operators without extensive background knowledge. The optical metrology machine allows for non-contact measurements of detailed three-dimensional (3D) surfaces, using a zoom-in/out stereomicroscopy technique and a digital signal processor (DSP). It has a 3D resolution of up to 0.25µm, which enables high accuracy measurements of chip features. Additionally, the microscope contains built-in image recognition and enhanced filtering capabilities to improve accuracy. KOBELCO LTA-1000 supports a variety of testing methods, such as electrical and mechanical characterisation, physical characterization and wafer-level defect inspection. The measurement procedures are based on parametric tests to obtain information on process conditions and device structure. For example, parametric tests can provide information such as contact resistance, total feature size and overlay accuracy of chip components. In particular, the tool can analyse image quality of deposited materials, such as dielectric layers. Furthermore, LTA 1000 is equipped with data logging capabilities that can link the measured data to specific parts and test setups in order to facilitate traceability. The asset also contains a thermal transfer module that can measure thermal diffusivity, which is useful for material characterization. The model further offers motion and vibration isolation, dustproof covers and a safe touch operating equipment. Overall, LTA-1000 is an indispensable tool for the development of miniaturized components, offering superior precision and accuracy. It is highly reliable, with intuitive control and data collection functions, enabling faster and better wafer yield.