Used KOBELCO LTA-1512 #9314399 for sale

KOBELCO LTA-1512
ID: 9314399
Vintage: 2009
Lifetime measurement system 2009 vintage.
KOBELCO LTA-1512 is an ideal wafer testing and metrology equipment for the semiconductor and optoelectronic industries. It combines various measurement systems into one platform with high accuracy, fast throughput, and intuitive software to enable users to quickly and efficiently measure substrates at various levels of complexity. The system is based on an Automated Measurement Tool (AMT) which controls and manages its subsystems such as optical systems and mechanics. The optical systems include image sensors and an optomechanical device capable of measuring the light intensity of wafers. The optomechanical device can also measure the resistivity of the wafer surface. The mechanics of the unit include a variety of adjustable Z-axis stages and tooling for holding and maneuvering substrates. The control machine uses a graphical user interface (GUI) as well as Windows-based software to allow users to easily adjust the parameters of the desired measurement and visualize the results. LTA-1512 is equipped with several high accuracy and high throughput measurement systems. These systems include a variable angle ellipsometer (VAE), reflectometer, scatterometer, and interferometer that can measure optical properties like refractive index, reflectivity, scattering, transmittance, and interference. To measure the resistivity of the wafer surface, the tool uses a combined mechanical and electrical contact method. Additionally, KOBELCO LTA-1512 also features a 3D optical profilometer (OP). Using this asset, users can measure the various features of wafers such as step heights, scribing lines, and voids. LTA-1512 offers an innovative and efficient way to test wafers with high accuracy and throughput. With its easy-to-use GUI and software, users can easily adjust parameters and visualize results. Its advanced optomechanical device, high accuracy measurement systems, and combined mechanical and electrical contact method allow users to quickly and accurately test even the most complex wafers. This model is ideal for the semiconductor and optoelectronic industries, providing reliable and cost-effective testing with increased accuracy and throughput.
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