Used KOSAKA LAB ET 4000 #9238800 for sale
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ID: 9238800
Vintage: 2018
3D Surface roughness analyzing system
Appropriate for measurement:
Micro figure
Step height
Roughness of FPD
Wafers
Hard disks
Other nano-order application
Sample size: 210 mm × 210 mm to 300 mm × 400 mm (Maximum)
Repeatability: 1 σ within 0.5 nm
Measuring range:
Z: 100 μm
X: 100 mm
Measuring force: 0.5 μN to 500 μN
2018 vintage.
KOSAKA LAB ET 4000 is a high-precision wafer testing and metrology equipment capable of measuring a wide range of parameters with high accuracy and repeatability. With its advanced scanning technology, it provides accurate measurements of critical dimensions, various topological features, and other critical dimensions on micro-components. ET 4000's unique patented design is based on a combination of optical and X-ray microscopy and includes an autostage system. This unit allows for the automatic movement of the wafer in order to measure the full range of features that might be present. As well, its ability to measure various geometric features, such as step height, line width, and various surface features makes it the ideal tool for complex wafer measurements. KOSAKA LAB ET 4000 achieves high-precision measurements with a machine of tight core control and optimization. This tool includes a top-level metrology software package in addition to a precision motion asset with servo-motor controlled stage movements. The stage movements maximize accuracy and repeatability while minimizing friction and error-prone translations. In addition to the software and motion model, ET 4000 includes an integrated and highly accurate optical image analysis equipment. This optical system provides quick and accurate measurements of critical dimensions and other critical features. It performs automatic calibration based on a variety of wafer dimensions, allowing the unit to achieve even greater accuracy and repeatability. Finally, KOSAKA LAB ET 4000 also includes a high-precision digital image analysis machine for measuring topological information. This tool provides rapid analysis of surface features, 3D data, and other 3D-related parameters. This asset includes high-resolution data acquisition and field-of-view control, enabling accurate measurements of intricate features and surface features, quickly giving engineers the results they need. ET 4000 is the ideal tool for wafer testing and metrology. With its precision motion, image analysis, and digital image analysis, it provides accurate and repeatable measurements of various wafer features in a short period of time. Its extensive feature set makes KOSAKA LAB ET 4000 an invaluable tool for engineering professionals that require rapid evaluation of complex micro-component structures.
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