Used LAKESHORE 7507 #9410569 for sale

ID: 9410569
Measurement system.
LAKESHORE 7507 is a wafer testing and metrology equipment that uses integrated sensors, transducers and electronics to accurately measure and control the testing of semiconductor wafers. The system provides environmentally-controlled testing of wafers up to 6 inches in size. The unit features optical systems with two integrated Position Sensitive Detectors (PSDs), enabling automatic alignment and registration of wafers. This ensures wafer-to-wafer accuracy and repeatability. The optical systems also provide laser micrometer capabilities for inspecting of complex surface profiles. The machine is equipped with Motion Control Systems that can measure and control XYZ displacement. This allows for automated wafer transport, mapping and indexing as well as wafer-to-wafer and process-to-process repeatability. 7507 offers temperature control capabilities with thermoelectric heaters and temperature sensors to ensure process accuracy and stability. This temperature control and control of the testing environment are critical to ensuring the accuracy of measurement results. The tool is also equipped with bias supplies, amplifiers and A/D converters to enable wafer-thickness gauging, flatness measurement and detection of structural defects or features. Internal data storage and a VME-bus interface enable flexibility in data transfer and integration with other systems. LAKESHORE 7507 is a reliable, accurate and versatile asset for wafer testing and metrology. Utilizing an integrated suite of hardware and software technologies, this model is capable of testing multiple parameters simultaneously, ensuring measurements are repeatable and traceable for process development and production.
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