Used MAGNETRON / CLIOTEK ATM500 #9352037 for sale

ID: 9352037
Vintage: 2002
Thin film measurement system Manual 2002 vintage.
MAGNETRON / CLIOTEK ATM500 is a robust and reliable wafer testing and metrology equipment designed for dedicated and/or product line test and measurement. It can handle all types of circuit substrates up to 500 mm in diameter, making it an ideal choice for manufacturers of silicon wafers or related substrates. CLIOTEK ATM500 features a wide range of built-in testing capabilities, including testing and measurement of electrical parameters such as resistance, capacitance, and current. It is also capable of automating the testing of wafer properties such as dielectric constant, breakdown voltage, and etching profiles. Furthermore, advanced functionality such as a patent pending "Optimized Test Algorithms" and a sophisticated electrostatic charge detection system allow for the execution of fast and accurate testing. MAGNETRON ATM500 unit is built on a rigid, vibration-resistant mechanical platform. The machine utilizes precision DC motors with dual encoders for accuracy within ± 1 μm for substrate position and ± 0.2 μm for linear geneva scanning. This precision allows for testing and measurement of small structures on the substrate. The compact tool also includes sophisticated optics and objective lenses for precise visual inspection, a laser mouse for die navigation, a manual theta-platform for handling medium-sized substrates, and a spindle speed adjustment asset. Additionally, ATM500 model contains a range of advanced automation and control mechanisms to optimize equipment performance, including adjustable ladder speeds, auto-leveling, edge inspection, and thermal uniformity/fringing. To facilitate research, MAGNETRON / CLIOTEK ATM500 system includes an integrated I/O interface to enable direct connection to external test controllers and electronic equipment. The integrated plug-and-play unit is compliant with a wide variety of software, hardware, and automation architecture. This user-friendly machine is supported by an extensive library of source codes for test setup and protocol orchestration, making it an ideal choice for advanced wafer testing and metrology applications.
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