Used NANOMETRICS Atlas II+ #9242231 for sale
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ID: 9242231
Wafer Size: 12"
Vintage: 2016
System, 12"
(3) Load ports
(3) Modules
FFU System
EFEM Drive system
Multi-stage filtration
EFEM Transmission system
Internal robot
Stage slide system
Optical system (SE/SR)
Magnetic suspension shock absorption system
Temperature control system
Data processor
Signal interface
Data interface
Power interface
Ventilation and vacuum tests
Data analysis system
Workstation
Debugging
Wafer transfer system
Loadport
PDU Power distribution system
External power supply
Manipulator and controller
Temperature control system
Internal temperature fluctuation: 0.1°
Power supply: 220 VAC
Vacuum: 650 mm Hg
Compressed air: 100 PSI
2016 vintage.
NANOMETRICS Atlas II+ wafer testing and metrology equipment is a precise, reliable and efficient tool for characterizing the electrical and physical properties of wafers in the semiconductor industry. The system offers a wide range of integrated modules for performing different types of analysis, including physical metrology, electrical testing, logic and parametric testing, electrical defect analysis, and wafer-level physical metrology. The unit is built around a multi-axis, motor-driven stage that precisely controls the wafer handling. This stage is capable of precise motion control and positioning for wafer mapping, defect localization and grain/surface analysis. The stage is also robust and stable, allowing the machine to work in a variety of cleanroom conditions. In addition, the tool has two separate optical systems for improved resolution and measurement accuracy. The flexible inspection features of Atlas II+ include electrical test parameters and measurements such as temperature, voltage, current, charge, capacitance, inductance, and resistance. The asset also offers powerful analytical tools for interpreting measured data, which helps speed up the physical metrology process. For high-resolution imaging, the model can use a variety of optical inspection modes, such as bright-field and dark-field imaging, phase contrast imaging, and scanning electron microscopy. The equipment is compatible with numerous metrology wafers and has the ability to modify its parameters as needed to accommodate any changes in material, processing conditions or wafer characteristics. Furthermore, NANOMETRICS Atlas II+ allows the user to tailor the desired analysis, and all the collected data can be stored in a database for easy retrieval and analysis. Thus, Atlas II+ is a powerful and efficient metrology system which provides users with a wide range of capabilities for performing electrical, physical and logic tests on wafers. Its high accuracy, combined with flexible measurements, intuitive operation and database capability makes it an indispensable tool in the semiconductor industry.
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