Used NANOMETRICS Atlas #9244874 for sale
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ID: 9244874
Wafer Size: 12"
Vintage: 1995
OCD Metrology system, 12"
Missing parts
1995 vintage.
NANOMETRICS Atlas is a state-of-the-art equipment for wafer testing and metrology.With the scaling of device geometry, the need for ever increasing accuracy and repeatability of measurements has brought in a need for automated wafer testing and metrology systems. Atlas is an automated metrology system which provides accurate measurements of electrical, electrical parameters on wafers.It incorporates several high-performance lasers, sensors and control systems, as well as a data acquisition unit which provides simultaneous multiple results.The machine is capable of measuring a variety of parameters on the wafers such as contact resistances, height profiles, etch depth, devicerouting, etc. The tool uses a laser vibrometer which is based on interferometer technology to measure the height profile of the wafers.The laser is used to sense the surface profile of the wafer and the data is collected and analyzed in real-time.The asset is also capable of performing a variety of secondary metrology operations such as resistive isolation and contact resistances. The model also incorporates automated defect detection, which can identify and classify different types of defects such as open circuits, short circuits, and dead-short circuits.The equipment is also equipped with an enhanced defect-marking software which can mark and identify areas on the wafer which are prone to defects to help guide corrective action to address them. In addition to the automated capabilities, NANOMETRICS Atlas also provides the ability to manually adjust measurement parameters in order to optimize measurements results.The system allows for a range of parameters such as spot size, laser power, and exposure duration to be set manually, and also provides advanced data analysis and control functions such as curve fitting, statistical process control (SPC), and more. Overall, Atlas is a powerful and comprehensive wafer testing and metrology unit designed to provide fast and accurate measurements in order to ensure production of quality wafers.With its range of automated and manual functions, the machine is an essential tool for any modern wafer fabrication process.
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