Used NANOMETRICS Atlas #9251048 for sale

ID: 9251048
Vintage: 2006
OCD Metrology system 2006 vintage.
NANOMETRICS Atlas is a wafer testing and metrology equipment engineered for high-precision analysis of semiconductor devices. It is an automated platform for fab-level and wafer-level electrical analysis, wafer mapping and dimensions measurements as well as defect detection, enabling customers in the fabrication and semiconductor test industries to improve process control and anticipate yield losses. Atlas offers a unique combination of speed and accuracy, enabling rapid optimization of manufacturing and test processes. The system offers a small and flexible footprint, making it ideal for on-site installation in a production environment. NANOMETRICS Atlas combines the highest precision metrology with state-of-the-art sensing technology to ensure accurate and reliable measurements. The unit contains a low-σ wafer scanning stage, three dedicated metrology heads (for dimensions, electron-beam (EB) based defect detection and automated optical inspection) and an automated probe station. It allows simultaneous feedback of critical electrical parameters and test patterns with patterned optics and metrology data. Atlas is capable of providing detailed wafer mapping and electrical data as well as a top-down etch profile analysis, thanks to its advanced EB capabilities. Additionally, the machine is optimized for higher throughput and improved performance by adding advanced scanning and test speed enhancements. NANOMETRICS Atlas has a wide range of possible configurations, with various specifications allowing the tool to be customized for specific needs. The secure and well-equipped software environment allows for quick setup and a smooth start of complex projects. It enables real-time data sharing and report generation, allowing faster adaptation and validation of new processes. In summary, Atlas is a versatile and efficient wafer testing and metrology asset for semiconductor-device analysis and test. Its combination of speed and accuracy allows for optimization of manufacturing and test processes, ultimately leading to improved productivity and reduced yield losses.
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