Used NANOMETRICS Atlas #9256431 for sale
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NANOMETRICS Atlas is a state-of-the-art wafer testing and metrology equipment used by the semiconductor industry, allowing testing and inspection of structures with both sub 220nm and up to 28 µm features. The system is designed to perform on-the-fly re-characterization of chips, providing precise data on device and process performance and giving an understanding of the underlying physical phenomena during the process. Atlas combines electrical test, metrology, and imaging capabilities into a single platform in an automated, optimized package. Its high-performance and reliability makes NANOMETRICS Atlas the perfect choice for performance-critical wafer testing and metrology applications. Atlas can perform a range of tests on wafer samples, from non-destructive electrical sheet resistance measurements to parametric wafer-level testing, and from gate delay measurements to automated ion-beam milling. Its integrated optical microscope and charge-coupled device (CCD) camera unit allow for high-resolution imaging and micrographs of structures down to 22 nanometers, while its high precision wafer stage allows for repeatable and accurate performance testing. The integrated scanning electron microscope (SEM) allows for surface imaging, thickness measurements and critical dimension (CD) measurements, as well as topography and roughness measurements. The SEM can be used in combination with the optical microscope for side-by-side imaging and registration, allowing for complex characterization of features and structures. The sophisticated, automated control software of NANOMETRICS Atlas allows for accurate pressure control and optimization of parameters during the testing and metrology process, while robust data acquisition allows for precise measurement of device and electrical parameters. In addition, the machine features industrial-ready technology standards, perfect for integration into cleanroom environments. In conclusion, Atlas is an invaluable tool for the semiconductor industry, designed to deliver precise and robust data for a range of wafer testing and metrology applications. Its high precision and unparalleled performance capabilities ensure it will remain a reliable go-to tool for wafer testing and process optimization.
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