Used NANOMETRICS NanoSpec 9000b #9361379 for sale
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ID: 9361379
Vintage: 2007
Thin film measurement system
Polarized / Normal-incidence spectroscopic ellipsometry:
Non-contact / Optical critical dimension
Wavelength range: 320-780 nm
DUV-Visible spectroscopic reflectometry:
Single / Multi-layer film thickness measurements
N&K Film optical properties and reflectance
Wavelength range: 190-780 nm
High throughput R/Θ/Z stage
N2000 User interface compliant to SEMI (E95-0200)
Measurement capabilities:
N&K Film optical properties
Single and multi-layer film thickness
Line width / Space
Sidewall angle
Line height
Line profile
Lithography applications:
Film thickness of BARC and photoresist
N&K
Copper CMP applications:
Low K thin film thickness
Barrier thickness (TaN)
Block
Erosion
Residuals
Oxide CMP applications:
Very thin film thickness (<100 Å)
ONO and NO Film stacks
Film thickness over arrays
Residuals
Si Etch applications:
Poly or WSi gate profiles
STI Profile
2D Structures and arrays
Dielectric etch applications:
Nitride and oxide film thickness
Low-K thickness
Damascene trench profile
DUV to Visible reflectometer
Normal incidence spectroscopic ellipsometry with R/Θ/Z stage
Operating system: Windows XP
Automatic focus
Optical non-contact pre-aligner (Centering and notch / Flat finder)
Wafer handling: Flat chuck
GEM/SECS (RS-232 or HSMS)
Feed location backside
Vacuum flow rate: G 533.4 mm Hg at 15 l/min
Line size: 6.35 mm (0.25 in.) OD
Connector type: SWAGELOK Bulkhead fitting (0.25x0.25")
Electrical: 110/208 VAC, 50/60 Hz, 10 A, Single phase
Power cord: Single 10 ft, 3-conductor, 14 AWG, 600 V.
2007 vintage.
NANOMETRICS NanoSpec 9000b is a wafer testing and metrology equipment that offers advanced characterization and defect-free testing capabilities. The system is equipped with a range of unique features and technologies, including a high-resolution imaging unit, high-speed image processor, wafer stage motion control machine, and a variety of specialized test probes. The foundation of NanoSpec 9000b is its CMOS image sensor and high-speed image processor. The tool includes three 8-megapixel imaging units that can simultaneously acquire up to 192 frames per second at up to 8 megapixels resolution. This imaging performance gives the NanoSpec unparalleled throughput and resolution accuracy, allowing it to detect the smallest defects and patterns on wafers. NANOMETRICS NanoSpec 9000b also includes a motion control asset with zero-clearance linear actuators that provide smooth motion and precise positioning of the wafer stage. This ensures that the wafers remain in a controlled environment for accurate testing and measurement. In addition to its motion control capabilities, the model also includes a variety of test probes, including laser, large area, cushion, and multi-probe probes. These probes provide a wide range of wafer testing and metrology capabilities. NanoSpec 9000b also features specialized hardware and software that enable it to detect and identify a variety of defects and patterns on wafers. This includes edge defects, protrusions, and other topographical features. The equipment also includes an automated inspection system that can quickly locate, measure, and mark defects on the wafer using advanced pattern recognition algorithm for automated defect review. In addition to testing and metrology, NANOMETRICS NanoSpec 9000b also includes software for wafer characterization. This includes a wide range of analysis and evaluation tools, such as automatic and manual defect review, image stitching, and wafer orientation repositioning. This makes the unit ideal for high-precision defect review and characterization. In conclusion, NanoSpec 9000b is a powerful wafer testing and metrology machine that is capable of detecting and characterizing even the smallest defects and patterns on wafers. Its high-resolution imaging tool and specialized hardware and software enable it to quickly and accurately identify and mark a wide range of defects and patterns. This makes the asset great for a variety of wafer testing and metrology applications.
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