Used NIKON AM-601D #293645645 for sale

ID: 293645645
Reticle inspection system.
NIKON AM-601D is a state-of-the-art wafer testing and metrology equipment built primarily for measuring nanometric surface topographic properties of materials. It is composed of a multi-axis integrated positioning system, an objective assembly containing optics, a detector, and the necessary electronics to detect the signal from the detector. This unit is able to acquire with high resolution 3D map images of the surface in the x, y, and z axes. The multi-axis positioning machine is equipped with highprecision air bearings which are mounted onto an inverted Y dual stage base structure. For high level accuracy, an air bearing with maximum collimation to reduce any possible error is used. This positioning tool can be paired with a workpiece tracjet or gantry for a greater range of motion. The objective assembly is built to ensure the highest possible resolution. This is achieved through the use of NIKON proprietary high numerical aperture objective lens which is integrated with a magnetically shielded optical arm. This ensures a stable optical platform with high accuracy, while maintaining a clean and non-dispersive optical path. The detector is a robust, non-destructive CCD detector. The CCD detector is mounted in a thermally and vibrationally downconverted environment, providing stability to the imaging surface. The CCD detector is mounted in a very close proximity to the objective lens ensuring a high signal-to-noise ratio. NIKON AM 601D asset is a highly advanced wafer testing and metrology model. It is designed to provide the highest level of precision, accuracy and repeatability, making it ideally suited for a broad range of nanometric surface topography measurement applications. The equipment is capable of producing high resolution surface images up to 2 μm with sub-nanometer repeatability. It offers a scan speed of up to 80 μm/sec, with fast measurements and short scanning times. The system is designed for a wide variety of materials such as metals, semiconductors, glasses and plastics. AM-601D is an ideal choice for research and development applications in the optical metrology field.
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