Used NOVA NovaScan 3060 #293655413 for sale

ID: 293655413
CD Measurement system.
NOVA NovaScan 3060 is an advanced wafer testing and metrology equipment designed for high-end technology nodes. It provides comprehensive wafer metrology and defect inspection solutions for semiconductor production. The system's scanning technology combines optical performance and stability, ensuring the highest accuracy in wafer metrology and defect inspection operations. The unit is equipped with an adaptive focus mechanism and Enhanced Current Imaging (ECI) technology to provide superior image contrast and resolution. Additionally, the machine offers three high-speed scanning techniques: standard, burst, and sliding scan modes. NovaScan 3060 utilizes an optical microscope with a long working distance that is optimized to suit any application. It also features an integrated wafer handling tool that offers automated handling of wafers up to twelve inches in diameter. The asset is also equipped with a high-density polarization filter to ensure an exact polarization profile for high-resolution imaging. NOVA NovaScan 3060 is capable of capturing images of test structures and defects at submicron levels, as well as providing precise positioning of probes. It includes a multi-spectral, multi-angle metrology model with easy-to-use, customizable software, allowing users to quickly acquire imaging and metrology data. The equipment also features a high throughput of up to 200 wafers per hour and a total accuracy of ±2 μm. NovaScan 3060 is equipped with a number of image enhancement algorithms, such as sharpening, dark-field, contrast and color saturation adjusting tools. Additionally, the system allows the user to store wafer images as multiple resolutions to best suit the application and inspect wafers without any re-scanning. Overall, NOVA NovaScan 3060 is an advanced wafer testing and metrology unit that offers superior imaging performance, accuracy, and productivity with its combination of imaging capabilities and intuitive user- friendly software.
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