Used NOVA NovaScan 3090 Next SA #9195941 for sale
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ID: 9195941
Wafer Size: 12"
Vintage: 2012
Critical dimension measurement system, 12"
Includes:
(3) Load ports
Interpretation computer (Mini IPC) kit
2012 vintage.
NOVA NovaScan 3090 Next SA is a wafer testing and metrology equipment designed to provide production-level accuracy at a fraction of the cost of traditional systems. It features a fully integrated software/hardware architecture and a digital image processor for rapid scanning of dielectric and organic films. The system is equipped with an advanced 3-stage optical unit, which enables high-level accuracy and repeatability with a wide range of wafer materials. NOVA NOVASCAN 3090 NEXTSA is a versatile machine that can be used for applications in optical inspection, metal-oxide-semiconductor (MOS) transistor and other power component testing, lithography patterning, chemical-mechanical polishing (CMP) and other related wafer metrology tasks. It functions with a digital auto-focus tool, an 8-inch image mirror, and a variable-wavelength laser illuminator for optimum accuracy and precision. The laser illuminator is adjustable to provide either reflectance or transillumination optically with minimal image noise. NovaScan 3090 Next SA features a modular design that can be customized to a variety of metrology applications such as die-level inspection and film thickness measurements. It comes with a single lens storage chamber, a 60x microscope with motorized focus, a 35mm digital imaging camera and a spectral reflectometer. The asset can be expanded with additional accessories, such as a CCD imaging model, a spectrometer, a computerized polarized microscope, and an optional multispectral imaging equipment. NOVASCAN 3090 NEXTSA also has the capability to detect non-uniformities, defects, and other material irregularities with its high sensitivity to surface non-uniformities via multiple operating modes, including Transmissive, 1-D Reflectometric Inspection (RI), and non-contact Surface 2-D (level) inspection. It is compatible with a wide range of substrates, including Si, quartz, polysilicon, sapphire, silicon, glass, and ceramics. The system is also designed with built-in safety features, including an auto-shutoff in the event of a power outage, and with a selfcalibrating unit that allows operators to calibrate the machine for optimal performance. NOVA NovaScan 3090 Next SA offers a fully automated tool with a user-friendly interface, allowing for faster test and measurement results. An integrated pick-and-place asset simplifies processes, while a fully integrated computer control model allows for easy data analysis without the need for additional hardware or software. The equipment is powered by a 6.8-amp stepper motor and delivers superior accuracy and repeatability with a wide range of materials and substrates.
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