Used RUDOLPH MP 200 #9250762 for sale

RUDOLPH MP 200
ID: 9250762
Wafer Size: 8"
System, 8" Cu Film thickness measurement system.
RUDOLPH MP 200 is a wafer testing and metrology equipment that provides accurate and comprehensive measurement data for IC and MEMS devices. This system is made up of a Scanning Electron Microscope (SEM) with focused ion beam (FIB) technology, a Laser Interferometer (Interferom) or a Laser Scanning Confocal Microscope (LSCM) with integrated hardware and software for topographical analysis of circuits and devices, as well as an extensive user-friendly software package (Probe Station) to support both manual and automated measurement applications. MP 200 is designed to meet the miniaturization needs of modern semiconductor devices, providing a wide range of analytical capabilities from electrical, optical, magnetic, and X-ray analysis. The unit is equipped with a high-resolution SEM which is used for imaging, analysis, and metrology. Its FIB technology is capable of performing precise and accurate pattern modifications needed for electrical testing. The laser interferometer machine enables precise measurements of wafer flatness and critical dimension (CD) alterations, while the confocal microscope provides 3D visualization of arbitrarily oriented devices. For manual measurements, the tool is equipped with a versatile Probe Station that includes two 4-axis stages for fine alignment. The Probe Station provides quantitative information about wafer geometries, profile shapes, and layer thicknesses. It features a suite of probing and imaging tools to automate operation and challenge established standards for dimensional accuracy. RUDOLPH MP 200 also includes an easy-to-use graphic user interface, allowing users to quickly set up complex experiments, or simulate measurements using an intuitive library of sample images. This GUI also includes a number of analysis tools for data postprocessing and reporting, as well as user-definable logic to customize experimental procedures. In conclusion, MP 200 offers a comprehensive set of testing and metrology capabilities that meet the demands of modern semiconductor technology. Its powerful hardware, intuitive software, and user-friendly GUI provide a cost-effective solution for acquiring comprehensive data on ICs and MEMS devices.
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