Used SIEMENS WalkAway 96Si #9231383 for sale

SIEMENS WalkAway 96Si Wafer Testing and Metrology Equipment is a full-featured, automated, inline measurement system designed to maximize throughput while providing reliable performance and accurate results. The 96Si unit combines high-precision optical measurements, advanced defect imaging and automated wafer handling, providing a comprehensive wafer process and inspection solution. The machine is capable of measuring wafers up to 930mm in length and 630mm in diameter, and can handle up to 6 wafers simultaneously. The tool features a multi-sensor optical metrology asset based on laser interferometers and multiple scatter metrology channels, providing high-precision 3D surface metrology. The 96Si also features a range of defect imaging capabilities, including high-resolution inspection and optic microscopy, enabling the automatic identification and classification of a wide range of defects, from defects as small as single-atom size up to the largest common defects. Additionally, the model is capable of positioning up to ten grids of 4,600 stitches on a single wafer, providing highly accurate and repeatable wafer positioning and mapping. The 96Si equipment is fully automated, offering integrated wafer handling, automated defect review and detailed, cross-wafer analysis capabilities. An integrated thermal control system maintains stable sample temperature to minimize distortion during high-precision measurement, while an automated calibration process ensures accuracy, repeatability and reliability of results. Additionally, the unit is capable of interfacing with host computers, enabling wafers to be carried directly to the machine or transferred via a conveyor, with status monitoring and alarm reporting generated directly to the host tool. The 96Si asset provides the industry-leading automation and measurement capabilities required for accurate and reliable wafer processing. The model is designed to maximize efficiency, allowing users to program a wide range of automated routines with minimal setup time and maintenance requirements. The integrated wafer handling, defect imaging and advanced metrology features of the 96Si ensure accurate, reliable measurement results for improved process control, yield optimization and wafer quality assurance.