Used SOLARIUS LaserScan 300 #293596806 for sale
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SOLARIUS LaserScan 300 is a wafer testing and metrology equipment which provides fast, accurate, non-contact metrology for semiconductor device and process development. The system is based upon a fully-modular design and provides an exceptionally high level of performance. The unit offers accuracy at the nanoscale, with the capability to measure features to less than 100 nanometers. This makes the machine ideal for measuring advanced structures such as ultra-shallow junctions, 3D structures, and sub-surface defects. Its high-resolution imaging capabilities provide a comprehensive view of the characteristics of the substrate and its features which can be used to identify defects, optimize processes and increase yields. This tool is equipped with a high-speed, high-resolution scanner and dual-beam laser-beam sources, offering the capacity to measure features with extraordinary speed and resolution. It features ultra-high accuracy metrology capabilities for both scanning electron microscopy and optical images, such as depth profiling, voltage measurements, and phase contrast imaging. LaserScan 300 also includes innovative data analysis functionality, providing powerful tooling for identifying defects, parameters and removal effects. The asset also incorporates an ultra-low profile wafer stacking model, which allows for quick sample changes and high throughput testing. In addition, this equipment also includes software to control sample handling, setup and meta-data management for each sample. This allows for improved operator safety, along with full documentation and traceability of each stage in the process. SOLARIUS LaserScan 300 is an ideal solution for those in the semiconductor industry and provides a cost-effective and reliable choice for wafer testing and process development. Its high-performance capabilities, fast data acquisition and unparalleled accuracy make it a standout choice for the most advanced wafer testing and metrology requirements.
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