Used TFM TFM-100 #9252380 for sale
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ID: 9252380
Coating and thin film thickness analyzer
Thickness range: 0.5 - 100 um
Wavelength range: 350 - 1,050 nm
Spot size: Approximately 4 mm
Repeatability (x10): < ±0.001 um at 1 um SiO2 on Si wafer
Light source: Tungsten halogen 1-6 W
Sample stage: 20 x 20 cm
Dimensions:
Detector: 22 x 22 x 7 cm
Light source: 12 x 17 x 5 cm
Scope: 20 x 20 x 17 cm
Power supply: 12 V, 1 A.
TFM TFM-100 is a robotic wafer testing and metrology equipment, designed and manufactured by TFM Corporation. The system is capable of efficiently measuring and analyzing physical attributes of semiconductor wafers, such as dimensions and radii of planar and spherical surfaces, as well as other parameters such as site specific defectivity. TFM-100 consists of three primary components - a mainframe, inspection head unit, and software. The mainframe stands 44 inches tall and is made from aluminum and composite plastic construction. The frameless, compact design assists in providing secure accommodation for the unit's internal components. The inspection head unit is a two-dimensional air-bearing encoder with a resolution of 10 nanometers, which allows for rapid vibration-free scanning. In addition, the machine operates in both manual and automatic modes, which allows users to customize the functionality and accuracy accordingly. The tool also comes with several software options. The Inspection Software Suite has over 40 different applications, with each application specializing in measuring and analyzing the appropriate physical attributes and defects for a detailed analysis of the wafer. The Suite also has unique testing features such as defect detection, double plotting, and user-defined alarms that enable users to quickly and accurately detect any potential problems. In addition, TFM TFM-100 utilizes a ZAxis 2000 controller and optimizes it with a high-speed pattern generator TMS-146. This combination allows TFM-100 to quickly analyze different materials and accurately measure geometric shapes. The asset doesn't require bulky paths and gauges, as it is mounted directly on the mechanical bench, saving valuable resources and space. TFM TFM-100 can also be used for multiple wafer testing, as the mainframe can accommodate up to five wafers, which can be quickly scanned and analyzed. Furthermore, the model is equipped with several features to protect both the equipment and the wafer from potential damage. It is also equipped with fault detection and diagnostic capabilities, so users can quickly and effectively resolve any potential problems. TFM-100 offers efficient and reliable values, as it has been tested and inspected in laboratories around the world. Due to its accuracy, reliability, and robust design, TFM TFM-100 is an ideal solution for measuring and analyzing wafers.
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