Used THERMA-WAVE OPTIPROBE 3290 DUV #9168988 for sale
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ID: 9168988
Vintage: 1997
Thin film measurement system
Open cassette for 6/8 application
Upgraded from OP3260DUV
Non-Cu process
Vacuum handling
1997 vintage.
THERMA-WAVE OPTIPROBE 3290 DUV is a state-of-the-art wafer testing and metrology tool. It is used for a variety of applications such as metrology, characterization, failure analysis, line-edge-roughness measurements, and scribe line testing. THERMA-WAVE OPTIPROBE 3290DUV is capable of detecting micron-level surface anomalies such as surface roughness, particle contamination, and step height irregularities. OPTIPROBE 3290 DUV utilizes a combination of Deep Ultraviolet (DUV) interferometry and polarization analysis to assess the surface characteristics of wafers. OPTIPROBE 3290DUV is equipped with a deep ultraviolet laser system, which emits highly coherent and focused beams with low optical noise levels. Furthermore, its detection range covers from <0.2 μm to 3 μm and the magnification range of the laser images is greater than 40μm. The combination of the DUV laser system and polarized light analysis allows THERMA-WAVE OPTIPROBE 3290 DUV to accurately measure the surface temperature of wafers. This makes THERMA-WAVE OPTIPROBE 3290DUV an ideal tool for precision temperature mapping and imaging. This plays a critical role in determining the stability of the substrate tested. OPTIPROBE 3290 DUV also comes with an integrated software package. This software contains a variety of analytical tools to enable efficient data acquisition and analysis. It also contains powerful graphical user interfaces to facilitate the visualization of the measurement results. OPTIPROBE 3290DUV is ergonomically designed and comes in a compact form factor. This makes it well-suited for installations in tight spaces and environments with limited access. Its user-friendly design enables easy setup and maintenance. Overall, THERMA-WAVE OPTIPROBE 3290 DUV is one of the most advanced wafer testing and metrology systems on the market. It provides reliable and accurate results for a variety of applications. Its ability to measure micron-level surface anomalies makes it especially suited for precise and detailed analysis.
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