Used TOHO TECHOLOGY FLX-2320S #293632535 for sale

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ID: 293632535
Wafer Size: 6"
Vintage: 2003
Thin film stress measurement system, 6" 2003 vintage.
TOHO TECHOLOGY FLX-2320S is a state of the art wafer testing and metrology equipment suitable for applications such as 3D-TSV, FinFET, Cu-Cu and MEMS fabrication. The system is capable of measuring both physical and electrical parameters SoC wafers and die of varying sizes and geometries. It can accurately determine the characteristics of up to 8 wafers per cycle. FLX-2320S utilizes 4-Quartz CCD non-contact wafer transfer stage, high resolution view fields and flexible optics to enable the taking of high resolution images and measurement of varied dimensions. The optics can be adjusted to fit various measurement targets. Additionally, this unit is equipped with a newly developed 6-stage CCD non-contact wafer transfer stage and an ICOS(intelligent color optical machine) to provide higher precision. The metrology capabilities of TOHO TECHOLOGY FLX-2320S provide powerful automated non-contact wafer sample characterization and analysis. The tool is capable of quickly collecting multiple wafer images and performing complex measurement tasks, where both shape parameters and edge roughness can be characterized in a single operation. The asset is highly repeatable (to within 3σ) and features automated measurement of up to 7 different angles from 0-90 degrees. This provides insight into the thickness uniformity, and microgeometries as well as complex surface geometries. FLX-2320S offers quick set up, automatic measurement, large depth of field and an easy to use control software package. The model can also be integrated with other test and processing equipment such as bonding systems and temperature controlled chambers, offering additional flexibility and seamlessly integrated end-to-end solutions. The robust design of TOHO TECHOLOGY FLX-2320S and its variety of metrology capabilities, together with its automation solutions, make the equipment an ideal choice for wafer testing and metrology. This system is designed to provide optimum results that ensure optimal yield, performance and quality within the semiconductor manufacturing process. FLX-2320S enables users to ensure a higher level of production efficiency while maintaining the best possible quality of their products.
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