Used TOKYO SEIMITSU Surfcom 590A-64 #9374922 for sale

TOKYO SEIMITSU Surfcom 590A-64
ID: 9374922
Wafer surface measurement system.
TOKYO SEIMITSU Surfcom 590A-64 is an advanced wafer testing and metrology equipment designed to provide accurate, reliable data and operations for the semiconductor industry. This system is a comprehensive solution for wafer testing, metrology, defect location, and review. Surfcom 590A-64 provides superior automated mechanical scanning metrology capability. It features eight individual axes of motion in three direction (X, Y, Z). This allows for precise wafer alignment, with an accuracy of ±0.5 μm. Additionally, the ScanHead consists of four measuring sensors, including X-Y stages to positively identify the wafer position. This allows for high accuracy scanning ability on substrates up to 8 inches. TOKYO SEIMITSU Surfcom 590A-64 features a variety of wafer testing functions, including optical inspection, electrical testing, and mechanical testing. The optical inspection function identifies defects quickly and accurately through the use of a high-resolution CCD camera. Other features include the ability to accurately locate foreign matter particles and scratches on wafers through the detection of light intensity variations. Finally, the electrical testing function uses an electronic projector to measure parameters such as the effective resistance and resistance distributions of contact pads and traces. Surfcom 590A-64 also comes with an advanced defect review unit, which allows users to review and document wafer defect information quickly and easily. This machine can store up to 500 defect images and text data, and provides the ongoing maintenance of image history for improved defect management. Additionally, this tool can identify potential root causes of defects and automatically suggest quality improvement methods. Overall, TOKYO SEIMITSU Surfcom 590A-64 is a highly advanced wafer testing and metrology asset that provides superior automated mechanical scanning metrology and various wafer testing functions. Surfcom 590A-64 is capable of delivering reliable, high-accuracy data to support the semiconductor industry. Its advanced defect review model also ensures improved defect management and quality improvements.
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