Used VEECO / BRUKER / SLOAN DEKTAK XT #293756643 for sale

VEECO / BRUKER / SLOAN DEKTAK XT is a wafer testing and metrology equipment using a stylus-based non-contact method. It is designed to characterize materials before and after processing and to measure nanoscale surface topography, surface roughness, and thickness. VEECO DEKTAK XT utilizes Atomic Force Microscopy (AFM) technology, which detects forces between the probe and the surface and provides 3D topography images of the sample surface. The standard system offers a 3-axis stage for sample positioning, with a standard maximum travel of 100 × 100 mm and a maximum speed of 0.5 mm/s. The vertical actuator provides a travel distance up to 24.3mm and includes a surface contact detector for accurately measuring stand off readings and the thickness of layered samples. Typical resolution is 0.05 micron in Z (vertical) direction. The unit's scan head contains a linear encoder that enables the probe to move efficiently and accurately across the sample while scanning. The scan head utilizes an integrated optical capacitance detection machine and backlash-free bidirectional stage steppers and has 8 micron repeatability along its full X/Y travel distance. The tool includes a computer, monitor, and equipment controller, and software for controlling the motion of the scan head and manipulator, streaming and recording scan data, and for data analysis. Optional calibration, automated calibration, throughput enhancement and advanced measurement options are available. SLOAN DEKTAK XT is extremely precise, stable and reliable and is used for a variety of applications including thin film thickness and resistivity measurements, wear and corrosion studies, bifunctional surface measurements, and surface roughness, wafer flatness and step height studies, making it an essential part of any wafer testing and metrology laboratory.