Used VEECO / BRUKER / SLOAN DEKTAK XT #9299921 for sale
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ID: 9299921
Vintage: 2012
Surface profiler
Vacuum adsorption
Chuck size: 100 x 100 mm
PC
Stage: 4" x 4"
Manually adjusting chuck
Operating system: Windows 7
Power control box missing
2012 vintage.
VEECO / BRUKER / SLOAN DEKTAK XT is a wafer testing and metrology equipment that provides highly accurate measurements of wafer parameters such as thickness, depth, profile, and CD. It is designed to perform non-contact, non-destructive measurements of thin wafers. The system measures the wafers without the need for contact probes or liquid etching. VEECO DEKTAK XT uses X-ray interferometry, meaning it calculates the differences in the x-ray travel times between the top and bottom of the wafer's surface. SLOAN DEKTAK XT offers both absolute profile and step height measurements, making it ideal for a variety of applications, including semiconductor metrology, surface texture analysis, and flat panel display metrology. BRUKER DEKTAK XT features a large 800 mm x 600 mm XY scanner table which is designed to provide maximum wafer coverage. It is also equipped with a high-precision Z-stage capable of full 10 nm resolution. The XY scanner is controlled by a three-axis servo control unit, and the Z-stage is driven by a high-speed, high-resolution motor. DEKTAK XT also features a vacuum chuck that securely holds the wafers in place during image acquisition. VEECO / BRUKER / SLOAN DEKTAK XT features the MetumaxTM profile software, which allows for fast and accurate profile acquisition. The MetumaxTM software can measure features as small as 0.25 nano-meters in size. The profile software also features a post-measurement analysis tool that can be used to compare data sets between measurements, as well as to analyze data collected in specialized application software. VEECO DEKTAK XT has a built-in camera machine which can be used to monitor the wafer during measurement. The camera is capable of acquiring images with resolutions up to 1024 x 768. The camera also allows operators to store profile images for comparison and post-processing. SLOAN DEKTAK XT is a powerful and highly precise wafer testing and metrology tool. It is ideal for a variety of applications and offers a wide range of features and capabilities. BRUKER DEKTAK XT is an excellent choice for any organization that demands accurate measurements of thin wafer parameters.
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