Used VEECO / DIGITAL INSTRUMENTS Dimension VX 330 #9379227 for sale
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VEECO Dimensions VX 330 is an advanced wafer testing and metrology equipment, designed to meet the stringent demands of semiconductor production. Utilizing powerful precision measurement hardware, advanced microscope optics, and modern video electronics, the system enables rapid, accurate measurement of wafers and samples. The unit features a precise three-axis motion platform, providing repeatable scanning accuracy over a large work area, with X-Y-Z resolution down to three nanometers. A high-resolution camera can capture image data at a resolution up to 6 microns. Automated edge zooming and targeting capabilities enable high accuracy, high speed alignment of measurements. The machine also features a high-performance graphite/ceramic sample stage that can accommodate both 150 and 200 mm wafers. Utilizing patented hybrid piezo actuators, the stage has exceptional linearity and hysteresis characteristics for stable, repeatable results. Self-diagnostics and active leveling makes wafer changing fast and accurate. The VX 330 comes with advanced analysis software, addressing a wide range of surface metrology applications, from wafer flatness, critical dimension (CD) measurements, and overlay results, to quantitative 3D contour imaging. Industrial-grade 3D imaging algorithms enable fast and accurate 3D profiling of complex samples. Combined with comprehensive statistical analysis, automated reporting capabilities, and sample archiving tools, the tool provides a comprehensive wafer testing and metrology solution for modern production testing facilities. Furthermore, the asset is architectural and software-upgradable, providing migration paths to new technologies and improving test throughput and repeatability.
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